Flexible film bulk acoustic resonators and filter-like structure made directly on polymer substrates

Lu, Liyang, Jin, Hao, Hu, Nana, Dong, Shurong and Luo, J. ORCID: 0000-0003-0310-2443 (2016) Flexible film bulk acoustic resonators and filter-like structure made directly on polymer substrates. Integrated Ferroelectrics, 168 (1). pp. 157-162. ISSN 1058-4587

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Official URL: http://www.tandfonline.com/toc/ginf20/current

Abstract

This paper reports a novel solid-mounted flexible film bulk acoustic resonator (FBAR) directly on polymer substrate with the merits of flexibility and no need for back etching process. (0002) oriented ZnO films deposited by sputtering, and aluminum and gold as the electrodes were used to fabricate the FBARs. Results show that the devices with aluminum electrodes have a resonant frequency at 1.2 GHz with an effective electromechanical coupling coefficient of ∼ 4.7%, a filter-like architecture improved the quality factor of FBAR from 19.6 to 164.2, and the devices remained working after bending at a large angle for hundreds of times.

Item Type: Article
Uncontrolled Keywords: film bulk acoustic resonator; Flexible electronics; polymer substrate
Subjects: Q Science > Q Science (General)
Divisions: University of Bolton Research Centres > Institute for Renewable Energy and Environmental Technologies
Depositing User: Sarah Taylor
Date Deposited: 10 May 2016 08:58
Last Modified: 08 Mar 2018 09:49
Identification Number: 10.1080/10584587.2016.1159538
URI: http://ubir.bolton.ac.uk/id/eprint/858

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