Film bulk acoustic resonators integrated on arbitrary substrates using a polymer support layer

Chen, Guohao, Zhao, Xinru, Wang, Xiaozhi, Jin, Hao, Li, Shijian, Dong, Shurong, Flewitt, A., Milne, W. I. and Luo, J. ORCID: 0000-0003-0310-2443 (2015) Film bulk acoustic resonators integrated on arbitrary substrates using a polymer support layer. Scientific Reports, 5. ISSN 2045-2322

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Abstract

The film bulk acoustic resonator (FBAR) is a widely-used MEMS device which can be used as a filter, or as a gravimetric sensor for biochemical or physical sensing. Current device architectures require the use of an acoustic mirror or a freestanding membrane and are fabricated as discrete components. A new architecture is demonstrated which permits fabrication and integration of FBARs on arbitrary substrates. Wave confinement is achieved by fabricating the resonator on a polyimide support layer. Results show when the polymer thickness is greater than a critical value, d, the FBARs have similar performance to devices using alternative architectures. For ZnO FBARs operating at 1.3–2.2 GHz, d is ~9 μm, and the devices have a Q-factor of 470, comparable to 493 for the membrane architecture devices. The polymer support makes the resonators insensitive to the underlying substrate. Yields over 95% have been achieved on roughened silicon, copper and glass.

Item Type: Article
Uncontrolled Keywords: Electrical and electronic engineering, Materials for devices, Nanoscale devices
Subjects: Q Science > Q Science (General)
Divisions: University of Bolton Research Centres > Institute for Renewable Energy and Environmental Technologies
Depositing User: Sarah Taylor
Date Deposited: 26 Mar 2018 09:56
Last Modified: 26 Mar 2018 09:56
Identification Number: 10.1038/srep09510
URI: http://ubir.bolton.ac.uk/id/eprint/1609

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