Flexible surface acoustic wave strain sensor based on single crystalline LiNbO3 thin film

Xu, Hongsheng, Dong, Shurong, Xuan, Weipeng, Farooq, Umar, Huang, Shuyi, Li, Menglu, Wu, Ting, Jin, Hao, Wang, Xiaozhi and Luo, J. ORCID: 0000-0003-0310-2443 (2018) Flexible surface acoustic wave strain sensor based on single crystalline LiNbO3 thin film. Applied Physics Letters, 112 (9). ISSN 0003-6951

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Abstract

A flexible surface acoustic wave (SAW) strain sensor in the frequency range of 162–325 MHz was developed based on a single crystalline LiNbO3 thin film with dual resonance modes, namely, the Rayleigh mode and the thickness shear mode (TSM). This SAW sensor could handle a wide strain range up to ±3500 με owing to its excellent flexibility, which is nearly six times the detecting range of bulk piezoelectric substrate based SAW strain sensors. The sensor exhibited a high sensitivity of 193 Hz/με with a maximum hysteresis less than 1.5%. The temperature coefficients of frequency, for Rayleigh and TSM modes, were −85 and −59 ppm/°C, respectively. No visible deterioration was observed after cyclic bending for hundreds of times, showing its desirable stability and reliability. By utilizing the dual modes, the strain sensor with a self-temperature calibrated capability can be achieved. The results demonstrate that the sensor is an excellent candidate for strain sensing.

Item Type: Article
Uncontrolled Keywords: surface acoustic wave, flexible strain sensor, thickness shear mode, crystalline LiNbO3 thin film
Subjects: Q Science > Q Science (General)
Divisions: University of Bolton Research Centres > Institute for Renewable Energy and Environmental Technologies
Depositing User: Sarah Taylor
Date Deposited: 23 Mar 2018 15:37
Last Modified: 02 Feb 2019 03:30
Identification Number: 10.1063/1.5021663
URI: http://ubir.bolton.ac.uk/id/eprint/1594

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