High performance dual-wave mode flexible surface acoustic wave resonators for UV light sensing

He, X. L., Zhou, J., Wang, B. W., Xuan, W. P., Yang, X., Jin, Hao and Luo, J. ORCID: 0000-0003-0310-2443 (2014) High performance dual-wave mode flexible surface acoustic wave resonators for UV light sensing. Journal of Micromechanics and Microengineering, 24 (5). ISSN 0960-1317

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Official URL: http://iopscience.iop.org/journal/0960-1317

Abstract

Dual-mode flexible ZnO/polyimide surface acoustic wave (SAW)-based ultraviolet (UV) light sensors were fabricated and their performance was investigated. UV light sensing measurements showed that the responses of the dual wave modes of the sensors increase with the increase of light intensity and the frequency changes linearly with the change of light intensity. Under a 4.5 mW cm−2 UV light illumination, the resonant frequency of the Rayleigh wave decreased up to ~43 kHz, while that of the Lamb wave was approximately 76 kHz. The UV light sensitivities for the two resonant modes are 111.3 and 55.8 ppm (mW cm−2)–1, respectively. The resonant frequency, phase angle and amplitude of the two resonant modes exhibited a good repeatability in responding to cyclic change of the UV light, and an excellent stability up to a long duration of UV light exposure. The dual-mode flexible SAW resonators are simple in structure, more accurate in detection, and can be fabricated at low cost are, therefore, very promising for application in flexible sensors and electronics.

Item Type: Article
Uncontrolled Keywords: Flexible SAW, ZnO/Polyimide, UV sensor
Subjects: Q Science > Q Science (General)
Divisions: University of Bolton Research Centres > Institute for Renewable Energy and Environmental Technologies
Depositing User: Sarah Taylor
Date Deposited: 23 Mar 2018 14:36
Last Modified: 23 Mar 2018 14:36
Identification Number: 10.1088/0960-1317/24/5/055014
URI: http://ubir.bolton.ac.uk/id/eprint/1585

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