High performance AlScN thin film based surface acoustic wave devices with large electromechanical coupling coefficient

Wang, Wenbo, Mayrhofer, Patrick M., He, Xingli, Gillinger, Manuel, Ye, Zhi, Wang, Xiaozhi, Bittner, Achim, Schmid, Ulrich and Luo, J. ORCID: 0000-0003-0310-2443 High performance AlScN thin film based surface acoustic wave devices with large electromechanical coupling coefficient. Applied Physics Letters, 105 (13). ISSN 0003-6951

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Official URL: https://aip.scitation.org/journal/apl

Abstract

AlN and AlScN thin films with 27% scandium (Sc) were synthesized by DC magnetron sputtering deposition and used to fabricate surface acoustic wave (SAW) devices. Compared with AlN-based devices, the AlScN SAW devices exhibit much better transmission properties. Scandium doping results in electromechanical coupling coefficient, K2, in the range of 2.0% ∼ 2.2% for a wide normalized thickness range, more than a 300% increase compared to that of AlN-based SAW devices, thus demonstrating the potential applications of AlScN in high frequency resonators, sensors, and high efficiency energy harvesting devices. The coupling coefficients of the present AlScN based SAW devices are much higher than that of the theoretical calculation based on some assumptions for AlScN piezoelectric material properties, implying there is a need for in-depth investigations on the material properties of AlScN.

Item Type: Article
Uncontrolled Keywords: AlScN, piezoelectric, SAW, high couple coefficient
Subjects: Q Science > Q Science (General)
Divisions: University of Bolton Research Centres > Institute for Renewable Energy and Environmental Technologies
Depositing User: Sarah Taylor
Date Deposited: 23 Mar 2018 14:30
Last Modified: 23 Mar 2018 14:30
Identification Number: 10.1063/1.4896853
URI: http://ubir.bolton.ac.uk/id/eprint/1584

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