Bendable ZnO thin film surface acoustic wave devices on polyethylene terephthalate substrate

He, Xingli, Guo, Hongwei, Chen, Jinkai, Wang, Wenbo, Xuan, Weipeng, Xu, Yang and Luo, J. ORCID: 0000-0003-0310-2443 (2014) Bendable ZnO thin film surface acoustic wave devices on polyethylene terephthalate substrate. Applied Physics Letters, 104. ISSN 0003-6951

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Official URL: https://aip.scitation.org/journal/apl

Abstract

Bendable surface acoustic wave (SAW) devices were fabricated using high quality c-axis orientation ZnO films deposited on flexible polyethylene terephthalate (PET) substrates at a low temperature of 120 ℃. Dual resonance modes, namely, the zero order pseudo asymmetric (A0) and symmetric (S0) Lamb wave modes, have been obtained from the SAW devices. The SAW devices are very flexible and durable, and perform well even after being bent with a large strain of 2500 με up to 100 times, demonstrated its suitability for the application in flexible electronics. The SAW devices were also found highly sensitive to compressive and tensile forces, exhibiting excellent anti-strain deterioration property, thus they are particularly suitable for the application in sensing large strains.

Item Type: Article
Uncontrolled Keywords: Bendable, SAW, ZnO, PET, Strain
Subjects: Q Science > Q Science (General)
Divisions: School of Engineering
Depositing User: Sarah Taylor
Date Deposited: 22 Mar 2018 14:55
Last Modified: 07 Jun 2019 14:48
Identification Number: 10.1063/1.4879850
URI: http://ubir.bolton.ac.uk/id/eprint/1579

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