Thermal annealing effect on ZnO surface acoustic wave-based ultraviolet light sensors on glass substrates

Wang, Wenbo, Gu, Hang, He, Xingli, Xuan, Weipeng, Chen, Jinkai, Wang, Xiaozhi and Luo, J. ORCID: 0000-0003-0310-2443 (2014) Thermal annealing effect on ZnO surface acoustic wave-based ultraviolet light sensors on glass substrates. Applied Physics Letters, 104 (212107). ISSN 0003-6951

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Abstract

Surface acoustic wave (SAW) based ultraviolet (UV) light sensors have a high sensitivity and have been extensively studied and explored for application. However, all of them were made of piezoelectric (PE) bulk materials or PE thin films on crystalline substrates such as Si and sapphire. This paper reports the fabrication of ZnO thin film SAW UV-light sensors on glass substrates and the effect of post-deposition thermal annealing on the sensing performance. It was found that annealing at temperatures higher than 300 °C can improve the properties of ZnO films and the sensing performance of the UV-sensors remarkably. When the ZnO film annealed at 400 °C was used for sensors, the UV light induced resonant frequency shift increased more than 20 times with the response speed reduced to less than 2.4 s, much better than those made on ZnO films with lower temperature annealing.

Item Type: Article
Subjects: Q Science > Q Science (General)
Divisions: University of Bolton Research Centres > Institute for Renewable Energy and Environmental Technologies
Depositing User: Sarah Taylor
Date Deposited: 22 Mar 2018 11:44
Last Modified: 22 Mar 2018 11:44
Identification Number: 10.1063/1.4880898
URI: http://ubir.bolton.ac.uk/id/eprint/1557

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