AlN-based BAW resonators with CNT electrodes for gravimetric biosensing

Garcia-Gancedo, L., Zhu, Z., Iborra, Enrique, Clement, M., Olivares, J., Milne, W. I., Ashley, G. M., Luo, J. ORCID: 0000-0003-0310-2443, Zhao, X. B. and Lu, J. R. (2011) AlN-based BAW resonators with CNT electrodes for gravimetric biosensing. Sensors and Actuators B: Chemical, 160 (1). pp. 1386-1383. ISSN 0925-4005

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Abstract

Solidly mounted resonators (SMRs) with a top carbon nanotubes (CNTs) surface coating that doubles as an electrode and as a sensing layer have been fabricated. The influence of the CNTs on the frequency response of the resonators was studied by direct comparison to identical devices with a top metallic electrode. It was found that the CNTs introduced significantly less mass load on the resonators and these devices exhibited a greater quality factor, Q (>2000, compared to ∼1000 for devices with metal electrodes), which increases the gravimetric sensitivity of the devices by allowing the tracking of smaller frequency shifts. Protein solutions with different concentrations were loaded on the top of the resonators and their responses to mass-load from physically adsorbed coatings were investigated. Results show that resonators using CNTs as the top electrode exhibited a higher frequency change for a given load (∼0.25 MHz cm2 ng−1) compared to that of a metal thin film electrode (∼0.14 MHz cm2 ng−1), due to the lower mass of the CNT electrodes and their higher active surface area compared to that of a thin film metal electrode. It is therefore concluded that the use of CNT electrodes on resonators for their use as gravimetric biosensors is a significant improvement over metallic electrodes that are normally employed.

Item Type: Article
Uncontrolled Keywords: BiosensorCarbon nanotube (CNT)Aluminum nitride (AlN)Bulk acoustic wave resonator (BAW)Gravimetric biosensor
Subjects: Q Science > Q Science (General)
Divisions: University of Bolton Research Centres > Institute for Renewable Energy and Environmental Technologies
Depositing User: Sarah Taylor
Date Deposited: 22 Mar 2018 11:07
Last Modified: 22 Mar 2018 11:07
Identification Number: 10.1016/j.snb.2011.09.083
URI: http://ubir.bolton.ac.uk/id/eprint/1554

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