Advances in piezoelectric thin films for acoustic biosensors, acoustofluidics and lab-on-chip applications

Fu, Y.Q., Luo, J. ORCID: 0000-0003-0310-2443, Nguyen, Nam-Trung, Walton, Anthony, Flewitt, A., Zu, Xiao-Tao, Li, Yifan, McHale, Glen, Matthews, Allan, Iborra, Enrique, Du, Hejun and Milne, William (2017) Advances in piezoelectric thin films for acoustic biosensors, acoustofluidics and lab-on-chip applications. Progress in Materials Science, 89. pp. 31-91. ISSN 0079-6425

[img]
Preview
Text
Luo J advances in piezoelectric thin films PubVer.pdf - Published Version
Available under License Creative Commons Attribution Non-commercial No Derivatives.

Download (10MB) | Preview
Official URL: http://www.sciencedirect.com/science/journal/00796...

Abstract

Recently, piezoelectric thin films including zinc oxide (ZnO) and aluminium nitride (AlN) have found a broad range of lab-on-chip applications such as biosensing, particle/cell concentrating, sorting/patterning, pumping, mixing, nebulisation and jetting. Integrated acoustic wave sensing/microfluidic devices have been fabricated by depositing these piezoelectric films onto a number of substrates such as silicon, ceramics, diamond, quartz, glass, and more recently also polymer, metallic foils and bendable glass/silicon for making flexible devices. Such thin film acoustic wave devices have great potential for implementing integrated, disposable, or bendable/flexible lab-on-a-chip devices into various sensing and actuating applications. This paper discusses the recent development in engineering high performance piezoelectric thin films, and highlights the critical issues such as film deposition, MEMS processing techniques, control of deposition/processing parameters, film texture, doping, dispersion effects, film stress, multilayer design, electrode materials/designs and substrate selections. Finally, advances in using thin film devices for lab-on-chip applications are summarised and future development trends are identified.

Item Type: Article
Additional Information:
Uncontrolled Keywords: Piezoelectric, thin film, acoustic wave, biosensor, microfluidics, acoustofluidics, lab-on-chip, ZnO, AlN
Divisions: University of Bolton Research Centres > Institute for Materials Research and Innovation
Depositing User: Tracey Gill
Date Deposited: 17 Aug 2017 10:36
Last Modified: 08 Mar 2018 09:47
Identification Number: 10.1016/j.pmatsci.2017.04.006
URI: http://ubir.bolton.ac.uk/id/eprint/1178

Actions (login required)

Edit Item Edit Item

Downloads

Downloads per month over past year

View more statistics

>